Advanced Deposition Materials Innovation
We develop application specific materials to meet customers’ needs from development to manufacturing.
This is how we do it:
1. Identify and Demonstrate New Materials
2. Enable Delivery of Materials
3. Scale up to HVM
Identify and Demonstrate New Materials
Through close collaboration with chip and tool manufacturers, we develop and test candidate precursors for the next generation films, devices, and process requirements. Film and process viability is demonstrated using in-house ALD and CVD tools.
Enable delivery of materials
Our containers and vaporizers for liquid and solid precursors meet customers purity and flow requirements. The designs are customized to precursors properties and material compatibility, incorporating coatings for corrosive materials. Each design is tested to optimize delivery conditions and meet deposition tool and process requirements.
- Modeling simulations
- Test stands with target precursors and actual process conditions
Chemical dispense equipment is also designed to meet fab’s productivity needs and are integrated into fab’s process tools.
A comprehensive Precursor Containers Portfolio
Scale up to HVM
Our rapid scale-up supports aggressive customer ramp plans. We ensure key product requirements identified during development are incorporated into high-volume manufacturing (HVM) consistently, using statistical process control (SPC). Cost, quality, and capacity improvement opportunities are identified and implemented throughout the product life cycle.
Featured White Paper
Developing Advanced Deposition Materials: A Recipe for Success
In this paper, we investigate how requirements for deposited film conformality are driving changes in process technology from chemical vapor deposition towards pulsed CVD and atomic layer deposition. We also discuss methods for developing and qualifying customized deposition materials that meet the needs of IDMs and the steps required for ramping to high-volume manufacturing.
Featured White Paper
The Silicon Precursor Toolbox for Low-temperature Deposition
This paper explains the complexity involved in selecting an ideal precursor and the broad range of precursors available. The number of possible approaches to solve a single integration challenge can be overwhelming and costly. Entegris has developed the precursor toolbox to help chip manufacturers find the best solution quickly.
Featured Animation
A Timeline of ADM Collaboration
Animated timeline of the collaborative processes used to develop advanced deposition materials (ADM) and Entegris' commitment at every step to ensure the material meets all the technical specifications and requirements to enable innovative technology. Runtime: 02:02
Featured Pictogram
Advanced Deposition Materials Innovation at Entegris
With semiconductor nodes shrinking to 10 nm and below and once-flat architectures evolving into complex 3D structures, whole new paradigms in material deposition must be developed. Entegris takes a holistic approach to advanced material development, yielding industry-leading innovation.
Featured Blog
Developing Advanced Deposition Materials: A Recipe for Success
Explore how through close collaboration, Entegris provides reliable, extremely high-purity materials to solve the most advanced technology challenges.
Product Solutions
We provide precursors to meet the industry's technical, quality and economic challenges
Detailed listing of the numerous deposition precursors and precursor delivery systems we offer.