Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)
Click the video icon to view a message about our new product offering from Rick Lindblom, Director, Fluid Handling Global Product Support.
Entegris fluid handling systems comprise the industry’s broadest range of carefully developed and fully characterized fluid handling products. Our products are rigorously tested to ensure reliability and constructed of robust materials that are able to withstand corrosive chemicals. All of our fluid handling products will improve the output of your fab by keeping your processes pure and efficient.
For additional product information, please visit www.entegrisfluidhandling.com or click on the specific product links below.
Sensing & Control
Entegris' Sensing & Control products offer precise control and measurement of your critical fluid processes. We provide integrated and stand-alone solutions for applications using corrosive chemicals, deionized water, slurry and chemical spiking and blending. Our reliable products include the NT ® family of integrated flow controllers, pressure transducers, flowmeters and gauge protectors, as well as Espy ® sensing products. Please click here for product information and specifications.
UN and DOT approved for safe handling of Group II and III chemicals
Ambient and high temperature air-driven pumps
Reliable PFA components for life sciences applications
Leak-free flare connections for standard, high-temperature and high-pressure applications
Larger orifice valves, fittings and tubing to reduce the number of systems in your fab
Ultimate defect reduction in point-of-use photochemical dispense
Specialized chemical mix, purification and management solutions
100% virgin PFA and FEP tubing for highly corrosive chemicals
Ultrapure valves and manifolds for various temperatures, pressures, flow rates, sizes and configurations