Gas Delivery Cabinet Systems
High-purity gas delivery systems
Entegris' high-purity gas cabinet systems have been designed to deliver a full range of processed toxic gases sub-atmospherically, eliminating the risk of catastrophic gas release and ensuring a safer work environment.
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The TX-4 ™ gas cabinet is designed to safely deliver highly toxic gases for semiconductor applications. The manifold is designed to minimize pressure loss, enabling maximum delivery of phosphine, arsine, or germane from sub-atmospheric gas sources.
Gases
- AsH3
- Ph3
- Subatmospheric storage and delivery (SAGS type I)
- Semiconductor
- Deposition
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