VaporSorb™ CLR Chemical Air Filters
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- Semiconductor manufacturing at sub-65 nm nodes
- Lithography, etch, CMP, metrology, and reticle storage
- Built-up front/rear-access frame banks or side-access housings
- Ceiling-mounted FFU at low- to medium-flow (0.5 to 1.0 m/s)
Specifications
Model 242412 | Model 241212 | |
Rated air flow: | 2000 CFM at 500 ft/min face velocity (2.54 m/s) | 1000 CFM at 500 ft/min face velocity (2.54 m/s) |
Height: | 592 mm (23.312”) | 287 mm (11.312”) |
Width: | 592 mm (23.312”) | 592 mm (23.312”) |
Depth: | 287 mm (11.312²”) | 287 mm (11.312”) |
Weight: | 14.5 kg (32 lb) | 9.1 kg (20 lb) |
Airflow resistance: | 0.35” water gauge @ 500 ft/min (2.4 m/s) | 0.35” water gauge @ 500 ft/min (2.4 m/s) |
Maximum operating temperature: | 49°C (120°F) | 49°C (120°F) |
Successfully Opted for software Updates
Part Number | Weight | Material Part Number | Depth | Height | Width |
---|---|---|---|---|---|
ESI004797-03 | 14.5 kg (32 lbs) | ESI004797-03 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-04 | 14.5 kg (32 lbs) | ESI004797-04 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-06 | 14.5 kg (32 lbs) | ESI004797-06 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-07 | 14.5 kg (32 lbs) | ESI004797-07 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-09 | 14.5 kg (32 lbs) | ESI004797-09 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-11 | 14.5 kg (32 lbs) | ESI004797-11 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-12 | 14.5 kg (32 lbs) | ESI004797-12 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004804-01 | 14.5 kg (32 lbs) | ESI004804-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-02 | 7.0 kg (15 lbs) | ESI004804-02 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-03 | 7.0 kg (15 lbs) | ESI004804-03 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-04 | 7.0 kg (15 lbs) | ESI004804-04 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-07 | 7.0 kg (15 lbs) | ESI004804-07 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-08 | 7.0 kg (15 lbs) | ESI004804-08 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI005085-03 | 14.5 kg (32 lbs) | ESI005085-03 | 287.35 mm (11.313") | 592.15 mm (23.313") | 490.55 mm (19.313") |
ESI005085-05 | 14.5 kg (32 lbs) | ESI005085-05 | 287.35 mm (11.313") | 592.15 mm (23.313") | 490.55 mm (19.313") |
ESI005286-01 | 14.5 kg (32 lbs) | ESI005286-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006046-01 | 14.5 kg (32 lbs) | ESI006046-01 | 228.6 mm (9.0") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006047-01 | 7.0 kg (15 lbs) | ESI006047-01 | 228.6 mm (9.0") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI006147-01 | 4.0 kg (9 lbs) | ESI006147-01 | 152.4 mm (6.0") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI006220-01 | 14.5 kg (32 lbs) | ESI006220-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-02 | 14.5 kg (32 lbs) | ESI006220-02 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-03 | 14.5 kg (32 lbs) | ESI006220-03 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-04 | 14.5 kg (32 lbs) | ESI006220-04 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-05 | 14.5 kg (32 lbs) | ESI006220-05 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-06 | 14.5 kg (32 lbs) | ESI006220-06 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-07 | 14.5 kg (32 lbs) | ESI006220-07 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-08 | 14.5 kg (32 lbs) | ESI006220-08 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-09 | 14.5 kg (32 lbs) | ESI006220-09 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-10 | 14.5 kg (32 lbs) | ESI006220-10 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-12 | 14.5 kg (32 lbs) | ESI006220-12 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-13 | 14.5 kg (32 lbs) | ESI006220-13 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-14 | 14.5 kg (32 lbs) | ESI006220-14 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-15 | 14.5 kg (32 lbs) | ESI006220-15 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006221-06 | 14.5 kg (32 lbs) | ESI006221-06 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006253-05 | 14.5 kg (32 lbs) | ESI006253-05 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006490-01 | 14.5 kg (32 lbs) | ESI006490-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006503-01 | 4.0 kg (9 lbs) | ESI006503-01 | 152.40 mm (6.0") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006536-01 | 14.5 kg (32 lbs) | ESI006536-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 490.55 mm (19.313") |
ESI006875-01 | 11.0 kg (25 lbs) | ESI006875-01 | 287.35 mm (11.313") | 508 mm (20.0") | 508 mm (20.0") |