VaporSorb™ PVD Chemical Filters
Contact your Entegris account manager or
- Semiconductor manufacturing at sub-22 nm modes
- Tool-top, tool interface or in-tool housings
- Configured to fit front-end modules (EFEMs) and process modules
Specifications
Materials | ||
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Casing: | Clear anodized aluminum | |
Media: | Application-specific blends of high performance adsorbents | |
Cover screens: | Clear anodized aluminum and polyester scrim | |
Gasket: | Closed cell polyethylene | |
Physical Performance | ||
Parameter | At | Target |
Air velocity distribution: | 9 points 0.1 m downstream of filter @ 0.5 m/s face velocity | Uniform distribution, variation ~0 |
Temperature/humidity variation: | 30 –70% RH 18°C –35°C (64°F–95°F) |
< 10% service life degradation |
Dust generation: | Particles per m3 | ISO 5-compliant |
Metal contaminants: | None detected | < 1 ng/L air |
Successfully Opted for software Updates
Part Number |
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ESI006590-01 |