Wafergard® GN Gas Filter Gun
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- Bulk Gas Delivery
- Deposition
- Dry Etch
- Ion Implantation
- Photolithography
Specifications
Materials | Gun | Body, trigger | White nylon-molded body |
Valve system | Stainless stell 304 | ||
O-ring | EPDM | ||
Tubing | Polyurethane | ||
Catridge filter | Membrane | PTFE | |
Shell, support | Polypropylene | ||
Operating conditions: | Maximum forward differential pressure | 0.4 MPa @ 20°C (68°F) | |
Maximum reverse differential pressure | 0.03 MPa @ 20°C (68°F) | ||
Maximum operating temperature with filter | 50°C (122°F) | ||
Weight: | Approx. 150 g (5.29 oz) | ||
Connections: | Filter gun | ¼ NPTF inlet NPT female | |
Retention: | Greater than 99.9999999% removal of all particles (referenced at the most penetrating particle size) |
Successfully Opted for software Updates
Part Number | Select Option |
---|---|
P03203J | Trigger repair kit (includes 1 trigger, 1 spring and 1 O-ring) |
WGFG01KL0 | Wafergard GN gas filter gun, 10/pk |
WGFG01KL5 | Wafergard GN Filter 5/pk |
WGGB01KAG | Wafergard GN Airgun |
WGGB01KAN | Wafergard GN gas filter gun |
XX67000WH | Polyurethane tubing with fitting, 2/1m /7ft |
XX671000T | Spiral Tube 1/40DX5M |