Optimizer® DI Filters
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Industry: Semiconductor (Photolithography)
- Chemistry: Photochemicals, Solvents
- Installation Point: Point-of-Tool
Specifications
Materials | Membrane: | UPE* |
Supports, core, sleeve: | HDPE | |
Housing: | PP | |
Membrane area | DI | 1800 cm² (1.94 ft²) |
DI-L | 3600 cm² (3.88 ft²) | |
DI-L (20 nm) | 2100 cm² (2.26 ft²) | |
Retention ratings | DI, DI-L | 0.2, 0.1, 0.05 µm, 20 nm |
Fittings | Available in a wide range of fittings including Super Type Pillar® fittings, compression seal (Swagelok® compatible fittings) and Flaretek® fittings. | |
Operating conditions | Maximum inlet pressure | 0.345 MPa (3.45 bar, 50 psi, 3.52 kg/cm²) @ 25°C (77°F) |
Maximum forward/reverse differential pressure | 0.345 MPa (3.45 bar, 50 psi, 3.52 kg/cm²) @ 25°C (77°F) | |
0.28 MPa (2.8 bar, 40 psi, 2.8 kg/cm²) @ 25°C (77°F) | ||
Operating temperature | 60°C (140°F) | |
*Surface-modified UPE | ||
Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date). |
Successfully Opted for software Updates
Part Number | Lithography Technology | Length | Retention Rating | Connection |
---|---|---|---|---|
CBUG0S0F1 | KrF | Short Capsule | 0.2 µm | 1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting |
CBUG0S0P1 | KrF | Short Capsule | 0.2 µm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CBUG0S0S1 | KrF | Short Capsule | 0.2 µm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CBUG2L0P1 | KrF | Long Capsule | 0.2 µm | 1/2" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fitting |
CBUG3L0P1 | KrF | Long Capsule | 0.2 µm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CBUG3L0S1 | KrF | Long Capsule | 0.2 µm | 3/8" inlet/outlet, 1/4" vent/drain, compression fittings |
CBUG6S0P1 | KrF | Short Capsule | 0.2 µm | 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUG8L0P1 | KrF | Long Capsule | 0.2 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUG8S0P1 | KrF | Short Capsule | 0.2 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUV0L0P1 | KrF | Long Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CBUV0L0S1 | KrF | Long Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CBUV0S0F1 | KrF | Short Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting |
CBUV0S0P1 | KrF | Short Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CBUV0S0S1 | KrF | Short Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CBUV2L0P1 | KrF | Short Capsule | 0.1 µm | 1/2" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fitting |
CBUV3L0F1 | KrF | Short Capsule | 0.1 µm | 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings |
CBUV3L0P1 | KrF | Long Capsule | 0.1 µm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CBUV3L0S1 | KrF | Long Capsule | 0.1 µm | 3/8" inlet/outlet, 1/4" vent/drain, compression fittings |
CBUV3S0P1 | KrF | Short Capsule | 0.1 µm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CBUV6S0P1 | KrF | Short Capsule | 0.1 µm | 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUV8L0P1 | KrF | Long Capsule | 0.1 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUV8S0P1 | KrF | Short Capsule | 0.1 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUX3L0P1 | ArF | Long Capsule | 20 nm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CBUX8L0P1 | ArF | Long Capsule | 20 nm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUX8S0P1 | ArF | Short Capsule | 20 nm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUZ0L0S1 | KrF | Long Capsule | 0.05 µm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CBUZ0S0F1 | KrF | Short Capsule | 0.05 µm | 1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting |
CBUZ0S0P1 | KrF | Short Capsule | 0.05 µm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CBUZ0S0S1 | KrF | Short Capsule | 0.05 µm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CBUZ2L0P1 | KrF | Long Capsule | 0.05 µm | 1/2" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fitting |
CBUZ3L0F1 | KrF | Long Capsule | 0.05 µm | 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings |
CBUZ3L0P1 | KrF | Long Capsule | 0.05 µm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CBUZ3L0S1 | KrF | Long Capsule | 0.05 µm | 3/8" inlet/outlet, 1/4" vent/drain, compression fittings |
CBUZ3L0X1 | KrF | Long Capsule | 0.05 µm | — |
CBUZ6S0P1 | KrF | Short Capsule | 0.05 µm | 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUZ8L0P1 | KrF | Long Capsule | 0.05 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CBUZ8S0P1 | KrF | Short Capsule | 0.05 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |