200 mm Reticle SMIF Pod
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- Mask production
- Reticle handling and storage
- Lithography process
Specifications
Capacity | One 150 mm reticle |
UV transmissivity (all colors) |
~0% @ ≤470 nm |
ESD performance | <2 seconds |
Weight | 1.38 kg |
Reliability | >50K MCBF |
Washability | No disassembly required |
Serialization | Permanent unique serialization labels |
Door flatness | 0.5 mm |
Successfully Opted for software Updates
-
RSP200-5500
RSP200 gasket kit, 20 ea
-
RSP200-5003
E200 door with PBT gasket, 10 ea
Part Number | Dome Type | Barcode | RFID | Door Type | Spacer |
---|---|---|---|---|---|
9700-9753-03 | Amber ABS | Yes | No | A200 | Yes |
9700-9753-04 | Amber ABS | Yes | No | A200 | No |
9700-9753-05 | Amber ABS | Yes | Yes | A200 | Yes |
9700-9753-06 | Amber ABS | Yes | Yes | A200 | No |
RSP200-1104W04-M | PEEK™ with window | No | No | A200 | No |
RSP200-1104W04-MR | PEEK™ with window | No | Yes | A200 | No |
RSP200-2004W04-M | PEEK™ with window | No | No | E200 | No |
RSP200-2104 | PEEK™ | No | No | E200 | No |
RSP200-2106 | PEEK™ | No | Yes | E200 | No |
RSP200-2106AK-1 | PEEK™ with AK handle | No | Yes | E200 | No |
RSP200-2106W04 | PEEK™ with window | No | Yes | E200 | No |
RSP200-2106W04-7 | PEEK™ with window | Yes | Yes | E200 | No |