The semiconductor industry is experiencing this with lithography, where extreme ultraviolet (EUV) lithography is replacing multiple level patterning for more and more critical chip layers in the sub-7 nm nodes.
スピーカー
- Dr. Wenge Yang | Vice President of Market Strategy
The semiconductor industry is experiencing this with lithography, where extreme ultraviolet (EUV) lithography is replacing multiple level patterning for more and more critical chip layers in the sub-7 nm nodes.
/content/entegris-live/ja/home/about-us/events/euv-enablement-solving-defect-challenges-in-the-euv-process-webinar-11498Recorded Webinar
Speaker: Dr. Wenge Yang, Vice President of Market Strategy
In this webinar, Dr. Wenge Yang discusses the latest technology developments related to EUV implementation and how to reduce defectivity and variability challenges in the EUV process.